发明名称 |
NITRIDE SINTERED COMPACT AND METHOD FOR PRODUCTION THEREOF |
摘要 |
<p>Provided are a novel insulating material high both in thermal con 2 O 3 in an inert atmosphere containing a specific quantity of carbon vapor, or by burning a coat of a nitride</p> |
申请公布号 |
KR20070030820(A) |
申请公布日期 |
2007.03.16 |
申请号 |
KR20067025748 |
申请日期 |
2005.06.20 |
申请人 |
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发明人 |
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分类号 |
C04B35/58;C04B35/581;C04B35/64;C04B41/87;H01L33/48 |
主分类号 |
C04B35/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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