发明名称 SEMICONDUCTOR DEVICE WITH VERTICAL CHANNEL AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>A semiconductor device and a method for manufacturing the same are provided to overcome the limit of channel length due to design rule and to increase cell current by changing the channel direction of a horizontal direction to a vertical direction. An active region has a first recess between surface regions(30b). An isolation layer(22) is surrounded to the active region. A pair of gate lines(27) is intersected on the active region. A portion of the gate line is filled in a second recess(30a). A first junction region(32a) is formed at the active region of the lower of the first recess. A second junction region is formed at the surface region. A vertical channel is formed between the first and the second junction regions.</p>
申请公布号 KR100695498(B1) 申请公布日期 2007.03.16
申请号 KR20050132568 申请日期 2005.12.28
申请人 发明人
分类号 H01L21/335 主分类号 H01L21/335
代理机构 代理人
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