| 摘要 |
PROBLEM TO BE SOLVED: To provide an internal structure-of-specimen detection device and the method for the same for detecting the shape of a minute scatterer in the specimen. SOLUTION: The specimen 10 is irradiated with the laser beam 12 the scattering light of 90°direction is condensed by the lens 14, and the image of scatterer is detected by a detector 18. The convolution integration of the function f regarding the scattering amplitude of the scattering body and the point response function h being the integration factor containing the focusing relation of the lens and the pupil function are approximated that the square root of intensity distribution on the detector is nearly equal to the Fourier transform Fä¾g¾}. The assumption that the Fourier transform Fä¾g¾}-Fäf}Fäh} (where the - means nearly equal) is satisfied. By the expression (1-Fäf})N<SP>2</SP>-ΣC<SB>k</SB>(Nθ<SB>k</SB>x<SB>k</SB>+Nψ<SB>k</SB>y<SB>k</SB>)<SP>2</SP>/2, the external information of the pupil function is compensated and the inverse Fourier transform is made possible. COPYRIGHT: (C)2007,JPO&INPIT
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