| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment system capable of realizing pressure control of a plurality of vacuum vessels with a simple construction and a method for controlling a pressure of the vacuum treatment system. SOLUTION: The vacuum treatment system comprises a plurality of vacuum vessels 1, gas supply paths for supplying a gas for pressure control into the respective vacuum vessels 1, a pressure control gas supplying apparatus 12 for supplying the gas for pressure control into the respective vacuum vessels 1 through the gas supply paths, gas discharge paths branched from the respective gas supply paths to be disposed, a vacuum evacuation pump 10 capable of discharging a gas through the respective gas discharge paths, and switching valves 5, 6 capable of switching a gas flow path so as to introduce a gas from the pressure control gas supplying apparatus 12 into either one of the respective vacuum vessels 1 or the respective gas discharge paths. COPYRIGHT: (C)2007,JPO&INPIT
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