Vacuum pumping device for use as oil-lubricated rotary vane pump, has drive and rotary units arranged such that transient area has sealing units separating conveying area from drive area, where one of sealing units is ferrous fluid seal

摘要

The device has a scrolling pumping stage (2) having a medium conveying area with rotors (6). A drive unit (4) generates a rotary movement and a rotating unit (3) converts the movement into an arbitrary movement of the rotors. The units are arranged in such a manner that the transient area of the units has sealing units for gas-proof separation of the conveying area from a drive area, where one of sealing units is a ferrous fluid seal (17, 18,19).