Magnetischer Ferrit-Film und Herstellungsverfahen

摘要

A magnetic ferrite paste is applied onto an Si substrate, and then sintered to form thereon a magnetic ferrite film having a mean composition that comprises from 40 to 50 mol% of Fe2O3, from 15 to 35 mol% of ZnO, from 0 to 20 mol% of CuO, and from 0 to 10 mol% of Bi2O3 with NiO and inevitable impurities as the balance. The magnetic ferrite film thus formed on an Si substrate is for magnetic devices, and it forms a region not containing CuO or having a CuO content of at most 5 mol% around its interface directly adjacent to the surface of the Si substrate. The adhesiveness of the magnetic ferrite film to the underlying Si substrate is high, and the reliability of the magnetic device having the magnetic film is therefore high.