| 发明名称 |
VORRICHTUNG ZUR FÖRDERUNG VON CHEMISCHEN WIRKSTOFFEN |
| 摘要 |
A bulk chemical delivery system, comprising: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. In non-limiting representative example, the bulk chemical canister may have a capacity of 200 liters. Also disclosed are novel manifolds for use in delivering chemicals from canisters and a transportation/containment cart. |
| 申请公布号 |
AT356314(T) |
申请公布日期 |
2007.03.15 |
| 申请号 |
AT20010104373T |
申请日期 |
1998.07.10 |
| 申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
NOAH, CRAIG M.;GREGG, JOHN N.;JACKSON, ROBERT M.;ESSER, CRAIG |
| 分类号 |
B01J4/00;B67D7/02;B67D7/84;C23C16/44;C23C16/448;C23C16/455;F17C7/00;F17C7/02;F17C9/00;F17C13/02;F17C13/04;H01L21/31;(IPC1-7):F17C13/04;B67D5/02;C30B25/14;B67D5/64 |
主分类号 |
B01J4/00 |
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