发明名称 Method for manufacturing semiconductor device
摘要 A method for manufacturing a semiconductor device is disclosed, in which a laser marking is formed on a rear surface of a wafer to prevent a Cu layer from being peeled by a protrusion of the laser marking. The method includes forming a laser marking on a rear surface of each wafer, and grinding a protrusion formed by the laser marking.
申请公布号 US2007059902(A1) 申请公布日期 2007.03.15
申请号 US20050320740 申请日期 2005.12.30
申请人 KIM JAE H 发明人 KIM JAE H.
分类号 H01L21/30 主分类号 H01L21/30
代理机构 代理人
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