发明名称 METHODS FOR COATING A SUBSTRATE AND FORMING A COLOURED FILM AND RELATED DEVICE.
摘要 <p>The invention concerns a method comprising the following steps: placing the substrate (12) in a vacuum chamber (14), forming a gas by evaporating a constituent which is liquid at atmospheric pressure and at room temperature and introducing a gas in the chamber (14). The gas is decomposed and a complementary gas is introduced into the chamber (14) designed to react with the decomposed gas, to form at least one thin film on the substrate (12). The invention also concerns a method for forming a coloured film and a related device (10) capable of implementing the inventive method.</p>
申请公布号 MXPA06011646(A) 申请公布日期 2007.03.15
申请号 MX2006PA11646 申请日期 2005.04.01
申请人 NEYCO. 发明人 JEAN DURAND;FRANCOIS LAUVRAY;ISABELLE RICHARDT
分类号 C23C16/12;C03C17/00;C03C17/36;C23C16/02;C23C16/40;C23C16/448 主分类号 C23C16/12
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