发明名称 |
METHODS FOR COATING A SUBSTRATE AND FORMING A COLOURED FILM AND RELATED DEVICE. |
摘要 |
<p>The invention concerns a method comprising the following steps: placing the substrate (12) in a vacuum chamber (14), forming a gas by evaporating a constituent which is liquid at atmospheric pressure and at room temperature and introducing a gas in the chamber (14). The gas is decomposed and a complementary gas is introduced into the chamber (14) designed to react with the decomposed gas, to form at least one thin film on the substrate (12). The invention also concerns a method for forming a coloured film and a related device (10) capable of implementing the inventive method.</p> |
申请公布号 |
MXPA06011646(A) |
申请公布日期 |
2007.03.15 |
申请号 |
MX2006PA11646 |
申请日期 |
2005.04.01 |
申请人 |
NEYCO. |
发明人 |
JEAN DURAND;FRANCOIS LAUVRAY;ISABELLE RICHARDT |
分类号 |
C23C16/12;C03C17/00;C03C17/36;C23C16/02;C23C16/40;C23C16/448 |
主分类号 |
C23C16/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|