| 摘要 |
A semiconductor pressure sensor is provided to realize miniaturization by forming a semiconductor sensor unit and an adjustment controlling unit on the same chip. A semiconductor pressure sensor includes a semiconductor sensor unit to detect a pressure, an adjustment controlling unit having a digital circuit(4) with a memory(11) to store compensation data of compensating an electric signal from the semiconductor sensor unit and a compensating and amplifying circuit(5) to compensate and amplify the electric signal, an input and output terminal(18) connected to an input and output pad(19) provided in the adjustment controlling unit to input data to the memory and to output the compensated and amplified electric signal, a voltage input terminal(20) connected to a voltage input pad(21) to input a voltage to the semiconductor sensor unit, a switch terminal(22) connected to a switch pad(23) provided in the adjustment controlling unit, a voltage input switch(9) connected to the switch pad and the voltage input pad, and an input and output switch(10) connected to the switch pad and the input and output pad.
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