摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film thermistor which is superior in reliability by eliminating changes in the characteristics due to an external lead-out electrode connected to a heat sensitive film. SOLUTION: A terminal electrode and a heat sensitive film which are formed on an insulating substrate to be used as an electrode of the entire heat-sensitive film are covered with a glass protective film so as to be shielded to the outside atmosphere. A pair of external connection electrodes to be connected to a pair of terminal electrodes are formed so as to extend to the outside of the glass protective film. Thus, the thin-film thermistor having such the structure is completed. COPYRIGHT: (C)2007,JPO&INPIT
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