| 摘要 |
PROBLEM TO BE SOLVED: To prevent ions having leaked from an ionization part from impacting a structure nearest to a beam line, in particular, a skimmer, in a gas cluster ion beam device. SOLUTION: A deflection device 20 with a magnetic field for changing the traveling direction of charged particles traveling from an ionization part 5 toward the skimmer 2 is arranged between the skimmer 2 and the ionization part 5. The deflection device 20 with a magnetic field includes: permanent magnets 21 for generating a magnetic field substantially vertical to a beam line of a gas cluster beam generated through the skimmer 2; and beam dampers 22 arranged by facing to each other, by interposing the beam line therebetween, in the direction of the magnetic field generated by the permanent magnets 21 and in a perpendicular direction to the beam line. COPYRIGHT: (C)2007,JPO&INPIT
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