| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of efficiently cleaning the inside of a groove part formed in a substrate holding member. <P>SOLUTION: The exposure device exposing a photosensitive substrate with a prescribed pattern through a projection optical system is provided with: a substrate stage PH which holds a substrate P and has a recessed part (groove part) 50 on a holding surface for holding the substrate P along a prescribed direction; a cleaning device 30 cleaning the inside of the recessed part formed on the substrate stage PH; and a driving device relatively moving the cleaning device 30 and the substrate stage PH so that the cleaning device 30 is moved along the prescribed direction with respect to the recessed part 50. <P>COPYRIGHT: (C)2007,JPO&INPIT |
