| 摘要 |
<p>An analysis method has a step (SA60) for developing a substrate, a first measuring step (SA50) for measuring an abnormality of the substrate before it is developed, a second measuring step (SA70) for measuring an abnormality of the substrate developed, and a step (SA80) for analyzing, based on the measurement results of the first measuring step (SA50) and the second measuring step (SA70), an exposure failure of the substrate exposed through liquid.</p> |
