PLASMABEHANDLUNGSAPPARAT, DESSEN ELEKTRODENSTRUKTUR UND STRUKTUR DER BÜHNE,申请号DE20006026996T-传众专利搜索

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发明名称	PLASMABEHANDLUNGSAPPARAT, DESSEN ELEKTRODENSTRUKTUR UND STRUKTUR DER BÜHNE
摘要
申请公布号	DE60026996(T2)	申请公布日期	2007.03.15
申请号	DE20006026996T	申请日期	2000.06.20
申请人	TOKYO ELECTRON LTD.	发明人	KOMINO, MITSUAKI;SASAKI, YASUHARU;TSUBOI, KYO;AMANO, HIDEAKI
分类号	H01L21/205;C23C16/46;C23C16/505;H01L21/00;H01L21/302;H01L21/3065;H01L21/31;H01L21/683	主分类号	H01L21/205
代理机构		代理人
主权项
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