METHOD FOR MANUFACTURING LINEAR CARBON MATERIAL AND METHOD FOR MANUFACTURING FUNCTIONAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a linear carbon material and a functional device, by which low temperature PECVD (plasma-enhanced chemical vapor deposition) can be carried out and inexpensive manufacture using a glass substrate or the like can be carried out.

SOLUTION: The method for manufacturing a linear carbon material to grow a linear carbon material such as a SWCNT (single-walled carbon nanotube) by using a catalyst and producing plasma of a source gas (such as CH4) comprising a compound containing carbon includes a first step (procedure 4) of generating plasma of a reducing gas (such as H2) and treating the catalyst with the plasma and a second step (procedure 5) of generating plasma of the source gas to grow the linear carbon material. When carrying out the PECVD reaction in the source gas plasma, the catalyst surface is treated with the reducing gas plasma prior to generation of the source gas plasma so as to maintain the catalytic activity in a high state.

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