METHOD OF FORMING CARBON NANOTUBE ON SUBSTRATE, METHOD OF FORMING CONDUCTING WIRE UTILIZING SAME, AND MANUFACTURING METHOD OF INDUCTOR ELEMENT UTILIZING SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an element, in more details, to provide a method of manufacturing an element through filling a groove with a carbon nanotube. SOLUTION: The manufacturing method of an element comprises a step of patterning a mold on a substrate, a step of applying a carbon nanotube in the groove formed by the patterning and on the whole surface of the mold, a step of filling the groove with the carbon nanotube applied on the whole surface of the mold, and a step for removing the mold. COPYRIGHT: (C)2007,JPO&INPIT