| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor laser element of the structure manufactured easily to provide a low noise characteristic, and astigmatic difference, and also to provide a manufacturing method thereof. SOLUTION: Astigmatic difference can be lowered in the region near the light emitting end surface with the structure which may be manufactured easily by forming double etching stop layers, by making smaller an interval d<SB>1</SB>between an active layer 104 and a waveguide ridge 112 in the region near the light emitting end surface than the predetermined interval, and then making larger an interval d<SB>0</SB>between the active layer 104 and the waveguide ridge 112 in the region other than the above region. Accordingly, distribution width of light is spread in the region other than the region near the light emitting end surface and thereby low-noise characteristic can be acquired by easily realizing self-oscillation. COPYRIGHT: (C)2007,JPO&INPIT
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