| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of controlling a linear pulse motor that can smoothly drive a stage to a desired position at high speed via a group of forcers driven in the X-axial direction and in the Y-axial direction along the raceway surface of a platen. <P>SOLUTION: When the stage 3 is driven to a desired position on the X-Y plane of the platen 4 via a group of the forcers 5X1, 5X2, 5Y1, 5Y2, the forcers are feedforward controlled by the total values of an instantaneous target position, a speed feedforward output value, and an acceleration feedforward value of the stage 3. Thus, the forcers can be driven smoothly without causing a delay to the instantaneous target position and without generating vibrations. As a result, the stage is driven smoothly to the desired position at high speed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
