发明名称 POSITIVE-TYPE RADIATION-SENSITIVE RESIN COMPOSITION FOR PRODUCING METAL-PLATING FORMED MATERIAL, TRANSCRIPTION FILM, AND PRODUCTION METHOD OF METAL-PLATING FORMED MATERIAL
摘要 <P>PROBLEM TO BE SOLVED: To provide a positive-type radiation-sensitive resin composition that is superior in sensitivity and resolution, exhibits superior adhesion to a substrate, leaves no residue at an opening after development, and is capable of preventing the occurrence of cracks in a resin film after metal plating and push-in of plated metal into the resin film, to provide a transfer film that uses the composition, and to provide a production method that can form a metal-plating material having a thick film as bumps and wirings with high accuracy. <P>SOLUTION: The positive radiation-sensitive resin composition, for producing a metal-plating formed material, comprises (A) a polymer having a structural unit having an acid-dissociative functional group, which is dissociated by acid to generate an acidic functional group, and a crosslinking structure; (B) a radiation-sensitive acid generator; and (C) an organic solvent. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007065642(A) 申请公布日期 2007.03.15
申请号 JP20060211263 申请日期 2006.08.02
申请人 JSR CORP 发明人 NISHIKAWA KOJI;MORI KOSUKE;OTA KATSU;IWANAGA SHINICHIRO
分类号 G03F7/039;G03F7/004;H01L21/027 主分类号 G03F7/039
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