| 摘要 |
PROBLEM TO BE SOLVED: To calculate system aberration including also a component not expressed by Zernike expansion. SOLUTION: A method has a space distribution calculation step of wave aberration wherein each wave aberration of an inspection optical element and an auxiliary optical element is treated as a distribution of the wave aberration at each point in a space, and the space distribution of the wave aberration is calculated; a system aberration space distribution calculation step wherein each wave aberration is calculated at every time when the inspection optical element is rotated at a prescribed angle over at least 360 degrees around a measuring optical axis of the inspection optical element, and the mean value of each wave aberration is subjected to the Zernike expansion, and thereby the wave aberration from which only an approximately rotationally symmetric component is subtracted is calculated as a space distribution of the system aberration of the auxiliary optical element; and a characteristic aberration calculation step wherein the wave aberration characteristic to the inspection optical element is acquired by subtracting the system aberration calculated in the system aberration space distribution calculation step from the wave aberration calculated in the space distribution calculation process of the wave aberration. COPYRIGHT: (C)2007,JPO&INPIT
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