RELAY SUBSTRATE, ITS MANUFACTURING METHOD, INSPECTION APPARATUS USING RELAY SUBSTRATE, AND METHOD FOR INSPECTING CIRCUIT BOARD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for inspecting circuit boards and capable of highly reliable electrical inspection even if circuit boards to be inspected have fine-pitch electrodes. SOLUTION: A relay pin unit 31 is provided with an intermediate holding plate 36, a first supporting pin 33 arranged between a first insulating plate 34 and the intermediate holding plate 36, and a second supporting pin 37 arranged between a second insulating plate 35 and the intermediate holding plate 36. A first contact supporting position of the first supporting pin to the intermediate holding plate and a second contact supporting position of the second supporting pin to the intermediate holding plate are arranged at different positions in a plane of projection of the intermediate holding plate projected to the thickness direction of the intermediate holding plate. An insulating part 62 made of an elastic high molecular substance and electrically-conductive-path forming parts 61 made of an elastic high molecular substance containing electrically conductive particles to be passed through the thickness direction of the insulating part 62 are formed in a plurality of through holes formed in a substrate in a relay substrate 29. The relay substrate 29 is mounted to relay electrical connection between a substrate 23 for pitch conversion and a circuit board 1 to be inspected. COPYRIGHT: (C)2007,JPO&INPIT