发明名称 |
Data representation relating to a non-sampled workpiece |
摘要 |
A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.
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申请公布号 |
US2007061032(A1) |
申请公布日期 |
2007.03.15 |
申请号 |
US20050224388 |
申请日期 |
2005.09.12 |
申请人 |
REEVES STEVEN P;MCINTYRE MICHAEL G |
发明人 |
REEVES STEVEN P.;MCINTYRE MICHAEL G. |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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地址 |
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