| 发明名称 |
THERMAL OPTICAL CHUCK |
| 摘要 |
An accessible optical path (34) to a lower surface of a heatable device under test is provided by a thermal optical chuck (20) comprising a transparent resistor (38) deposited on transparent plate (36) arranged to supporting the device in a probe station. |
| 申请公布号 |
WO2005121824(A3) |
申请公布日期 |
2007.03.15 |
| 申请号 |
WO2005US15977 |
申请日期 |
2005.05.06 |
| 申请人 |
CASCADE MICROTECH, INC.;RUMBAUGH, SCOTT |
发明人 |
RUMBAUGH, SCOTT |
| 分类号 |
G01R31/02;G01R1/04;G01R31/26;G01R31/28 |
主分类号 |
G01R31/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
