发明名称 |
Spreading diffused microwave plasma producing method, involves providing plasma ignited by resonant ignition structure with energy over surrounding microwave field such that spreading diffused plasma is produced |
摘要 |
<p>The method involves causing a plasma ignition, in which a resonance circuit is dimensioned and arranged in such a manner that high resonance field intensity is attained with a lower power coupling for the plasma ignition to inherently protect an ignition device. The plasma ignited by a resonant ignition structure (3) is provided with energy over a surrounding microwave field such that spreading diffused plasma is produced. An independent claim is also included for a device for producing spreading diffused microwave plasma.</p> |
申请公布号 |
DE102005043278(A1) |
申请公布日期 |
2007.03.15 |
申请号 |
DE20051043278 |
申请日期 |
2005.09.09 |
申请人 |
INP INSTITUT FUER NIEDERTEMPERATUR-PLASMAPHYSIK E.V. |
发明人 |
KROHMANN, UDO;NEUMANN, TORSTEN;EHLBECK, JOERG |
分类号 |
H05H1/18 |
主分类号 |
H05H1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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