Active measurement device, especially secondary ion mass spectrometer, has getter material arranged in vacuum chamber that takes up residual gases from vacuum chamber and thus improves vacuum in vacuum chamber

摘要

The measurement device (1) has a vacuum chamber (10), a getter material arranged in the vacuum chamber that takes up residual gases from the vacuum chamber and thus improves the vacuum in the vacuum chamber. A specimen carrier is arranged in the vacuum chamber, a primary ion source (2) fires a primary ion beam (3) towards the specimen (4), whereby secondary ions are emitted by the specimen, a mass spectrometer measurement device investigates the secondary ions and an extraction plate consisting at least partly of getter material accelerates them towards the measurement device. An independent claim is also included for the use of a getter material in a vacuum chamber of an active measurement device for vacuum improvement.