METHOD FOR GENERATING BAR CODE FOR USE IN SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

A bar code generating method in semiconductor manufacturing equipment is provided to prevent the generation of accidents due to the mistake of a worker and to reduce remarkably the loss of working by using a comparing process between reference information and design request information. Reference information and bar code information are inputted into bar code tooling. The reference information is compared with design request information(S10). When the reference information equals the design request information, the bar code information is transmitted to electronic beam equipment(S12). A bar code is formed on a reticle in the electronic beam equipment.