ELECTROSTATIC ACTUATOR, DROPLET DISCHARGE HEAD, DRIVE METHOD OF DROPLET DISCHARGE HEAD, AND MANUFACTURING METHOD OF ELECTROSTATIC ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator which can obtain a large oscillation plate displacement amount by low-voltage drive.

SOLUTION: It has a diaphragm 4, an individual electrode 11 opposed to the diaphragm 4 via a gap 10 with a voltage applied to the diaphragm 4, and an insulating film 4a formed in the surface of the diaphragm 4 opposed to the individual electrode 11. The insulating film 4a is caused to be electret.

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