| 摘要 |
PROBLEM TO BE SOLVED: To provide a backing plate capable of enhancing the cooling efficiency of a target material and fasilitating the exchange work of the target materia. SOLUTION: The backing plate 16 is used to fix the target material 14 and has a bottom part 31 for cooling the target material 14. The bottom part 31 has a first bottom part 33 and a second bottom part 34. The target material 14 is fixed on the lower surface 33a side of the first bottom part 33 through a metal solder. The second bottom part 34 is constituted of a porous metal. In the porous metal, cooling holes 35 are formed and cooling water 27 can enter the holes. In more detail, the cooling water 27 enters over a first cooling hole 35a in the vicinity of the entrance of the cooling hole 35. Thereby, the cooling water 27a existing in the first cooling hole 35a can be replaced with new cooling water 27, and the cooling efficiency of the target material 14 can be enhanced. COPYRIGHT: (C)2007,JPO&INPIT
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