| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus which forms a compact film consisting of particles that are mutually combined through a mechanochemical reaction with an AD method, by removing particles that have not contributed to the formation of the film, and has a simple structure. SOLUTION: This film-forming apparatus comprises: an aerosol-forming section for forming an aerosol by dispersing a raw powder in a gas; a film-forming chamber 8 for arranging a substrate therein; a spray nozzle 9 which is arranged in the film-forming chamber and spouts a supplied fluid toward the substrate therethrough; a supply passage for supplying the aerosol formed in the aerosol-forming section, to the spray nozzle; a valve 6 for opening/closing the supply passage; and a gas supply section 7 for supplying a gas to be spouted through the spray nozzle. COPYRIGHT: (C)2007,JPO&INPIT
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