发明名称 Optical proximity correction mask and method of fabricating color filter
摘要 An optical proximity correction mask used for fabricating a color filter includes a substrate, a mask pattern and a mending pattern. Wherein, the mask pattern is disposed on the substrate. The mask pattern and the transferred pattern, being transferred to the color filter, are not matched and cause occurrence of a light leaking region in the color filter. The mending pattern is disposed over the substrate around the periphery of the mask pattern and corresponds to the light leaking region.
申请公布号 US2007059609(A1) 申请公布日期 2007.03.15
申请号 US20050223339 申请日期 2005.09.09
申请人 WU HSIN-PING;LIN CHIA-HUEI 发明人 WU HSIN-PING;LIN CHIA-HUEI
分类号 G02B5/20;G03F1/00 主分类号 G02B5/20
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