| 摘要 |
A cleansing method of fluid-supply apparatus and cleansing module using the same is disclosed. First, a cleansing module is fixed to the fluid-supply apparatus to be cleansed for disposing the nozzles of the fluid-supply apparatus in the cleansing tank of the cleansing module. Second, a liquid used for cleansing is supplied inside the cleansing tank, and ultrasonic-wave vibration of the liquid is provided to remove plug stuck on the nozzles. Later, plug remained on the nozzles is scraped down and meanwhile the waste liquid is drawn out of the cleansing tank for further improving cleansing efficiency of the cleansing method. By using the cleansing method of the present invention, plug on the nozzles of the fluid-supply apparatus can be effectively removed and consequently lifetime of the fluid-supply apparatus is extended. Additionally, the cleansing method is capable of dramatically reducing working time required and of increasing efficiency of cleansing fabrication process.
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