发明名称 DEVICE FOR CHECKING PROCESS FLOW
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a checking device respondable to diversification and complication of a manufacturing process flow. <P>SOLUTION: This process flow checking device collates respective processes (processes A-G) of a process flow having the plurality of processes arranged in a predetermined order with a process specification rule for setting a start condition (process A) for defining a process for starting check, a stop condition (process C) for defining a process for stopping the check after starting the check, a restart condition (process E) for defining a process for restarting the check after stopping the check, a termination condition (process G) for defining a process for terminating the check, and a prohibition condition (process D) for defining a prohibited process between the process set by the start condition and the process set by the termination condition. This device checks whether the process corresponding to the prohibition condition exists between the processes corresponding to the start condition and stop condition and between the processes corresponding to the restart condition and termination condition. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007066253(A) 申请公布日期 2007.03.15
申请号 JP20050255045 申请日期 2005.09.02
申请人 NEC ELECTRONICS CORP 发明人 UEDA HIROSHI;TOYODA HIDEO;KAWAZOE HIROSHI;SUGIKAWA HIROSHI
分类号 G05B19/418;G06Q50/00;G06Q50/04;H01L21/02 主分类号 G05B19/418
代理机构 代理人
主权项
地址