METHOD FOR FORMING LITHIUM OR LITHIUM ALLOY THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a lithium thin film with which a lithium thin film with high purity can be always produced.

SOLUTION: A lithium or lithium alloy material is heated and evaporated to produce ultrafine particles of lithium or a lithium alloy within a ultrafine particle production chamber in an inert gas atmosphere. The ultrafine particles are carried into a film formation chamber in a vacuum atmosphere by a carrier tube in company with the inert gas. The ultrafine particles are injected under the pressure of the inert gas from a nozzle fitted to the tip of the carrier tube and heated to the melting point of the ultrafine particles or below toward a substrate arranged in the film formation chamber and heated to a temperature from 100°C to the melting point of the lithium metal or lithium alloy or below. Further, either the nozzle or the substrate is moved at an optional moving speed, thus a lithium or lithium alloy thin film is formed on the substrate at a desired film thickness.

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