METHOD OF MANUFACTURING LIGHT OR RADIATION DETECTION UNIT, AND LIGHT OR RADIATION DETECTION UNIT MANUFACTURED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a light or radiation detector and the light or radiation detector manufactured by this method which reduces the weight and avoids great restrictions on transporting or using the detector.

SOLUTION: At least a part of a read pattern composed of carrier collecting electrodes 33, capacitors Ca, thin film transistors Tr, data lines 34, and gate lines is formed with an evaporated or printed coat film separately from a semiconductor thick film 31. The flat-panel X-ray detector (FPD) 30 composed of the semiconductor thick film 31 and the read pattern is housed in a frame to form a unit. Using the semiconductor thick film 31 instead of the conventional glass board, the weight is reduced to manufacture an FPD 30 free from restrictions on transporting and using the detector.

COPYRIGHT: (C)2007,JPO&INPIT