| 摘要 |
PROBLEM TO BE SOLVED: To provide a condenser microphone with high sensitivity at a low manufacturing cost, and also to provide a manufacturing method thereof. SOLUTION: The condenser microphone includes: a plate with a fixed electrode and a throughhole; a diaphragm with a moving electrode and vibrated by a sound wave; and a spacer for supporting the plate and the diaphragm while insulating them and forming an air gap between the fixed electrode and the moving electrode, and at least either of the plate and the diaphragm is a single layer semiconductor film wherein a specific resistance of at least part of a near end part closer to the spacer is higher than that of the remaining region. COPYRIGHT: (C)2007,JPO&INPIT
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