| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that in the conventional substrate, as a resistor is formed by electroless plating, nickel must be used as the material for the resistor, and when a nickel film is formed by electroless plating, the reproducibility is degraded by the variation of the grain diameter of deposited nickel according to the temperature condition, the plating time, and the nickel concentration, so that it is difficult to always manufacture the resistors having the same resistance value. SOLUTION: This manufacturing method of a substrate with a high-frequency-use resistor comprises the steps of forming a resistor film 4 by a means of vapor deposition or sputtering etc. of a thin film resistor material at least on one surface of a conductive material 5 such as copper etc., laminating a substrate 1 of an insulating material on the conductive material having the resistor film formed thereon, forming a circuit pattern by removing the resistor film and the conductive film with an etching means, and forming a resistor in the circuit by removing the conductive film in the circuit portion which needs the resistor in the circuit pattern with an etching means. COPYRIGHT: (C)2007,JPO&INPIT
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