FORMATION METHOD OF PATTERN, ORGANIC ELECTROLUMINESCENT DEVICE, ITS MANUFACTURING METHOD, ELECTRO-OPTICAL DEVICE, ITS MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of composition dots capable of minimizing the difference of change rates of dryness of a liquid material due to substrate positions even when an organic solvent-based liquid material is discharged as droplets; and to provide a manufacturing method of an electro-optical device. SOLUTION: In relation to a manufacturing method of an organic EL display device, this manufacturing method of composition dots is implemented in a process for forming a luminescent layer by jetting, as droplets MR10, MR20 and MR30 of dot forming liquid materials containing a luminescent layer formation material and using solvents different in boiling points, a liquid material having a low drying property (high boiling point) and a liquid material having a high drying property (low boiling point) to a peripheral part of a substrate and a central part of the substrate, respectively. This manufacturing method of an electro-optical device is also provided. COPYRIGHT: (C)2007,JPO&INPIT