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发明名称
Planarisierung von einer nicht-konformen Vorrichtungsschicht in Halbleiterherstellung
摘要
申请公布号
DE69836943(D1)
申请公布日期
2007.03.15
申请号
DE19986036943
申请日期
1998.09.29
申请人
INTERNATIONAL BUSINESS MACHINES CORP.;INFINEON TECHNOLOGIES AG
发明人
VARIAN, KATHRYN H.;TOBBEN, DIRK;SENDELBACH, MATTHEW
分类号
H01L21/302;H01L21/3105;H01L21/3065;H01L21/3205;H01L21/762;H01L21/768;H01L23/522
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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