| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact magnetic sensor using a giant magneto-resistive device. SOLUTION: An X-axis magnetic sensor 11 provided in this magnetic sensor is equipped with a single substrate 10a, a plurality of bias magnetic films 12 to 15, ordinary GMR devices 16 and 17 each equipped with a single film fixed layer, and SAF devices 18 and 19 each equipped with a multi-layer film laminate fixed layer. The X-axis magnetic sensor detects an external magnetic field by means of a circuit made by bridge-connecting the GMR devices and SAF devices. By forming films constituting the GMR devices and SAF devices on the substrate and applying magnetic fields of the same direction to the films at a high temperature, the GMR devices and SAF devices turn to giant magneto-resistive devices with their magnetism detection directions different from each other by 180°. Further, the respective magnetic films give a bias magnetic field to both the GMR devices and the SAF devices. Since the above makes it possible to put giant magneto-resistive devices to close placement, a small magnetic sensor can be provided. COPYRIGHT: (C)2007,JPO&INPIT
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