发明名称 LASER THERMAL TRANSFER DEVICE AND LASER THERMAL TRANSFER METHOD
摘要 PROBLEM TO BE SOLVED: To provide a laser thermal transfer device and a laser thermal transfer method of applying a laser thermal transfer process by bonding a base plate and a donor film, with the use of a bonding frame formed of an electromagnet and a base plate stage equipped with the electromagnet. SOLUTION: The device includes a chamber 100 with a donor film 350 and a base plate 250 arranged in the inside, a base plate stage 200 equipped with a first electromagnet 210 and supporting the base plate 250 inside the chamber 100, a bonding frame 300 equipped with a second electromagnet 310, arranged above the base plate stage 200 inside the chamber 100, and bonding the donor film 350 to the base plate 250 supported by the base plate stage, and a laser oscillator 400 arranged on the outside or inside the chamber 100. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007066870(A) 申请公布日期 2007.03.15
申请号 JP20060080211 申请日期 2006.03.23
申请人 SAMSUNG SDI CO LTD 发明人 NOH SOK WON;KANG TAE-MIN;KIN CHINSHIYU;KWAK NOH MIN;LEE JAE-HO
分类号 H05B33/10;H01L51/50 主分类号 H05B33/10
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