| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an XY stage that can easily reduce a stage reaction force by a simple and inexpensive structure. <P>SOLUTION: This XY stage 10 is composed of a surface table 12 and a stage 16. The surface table 12 has a counter mass storage 32, and a counter mass 36 is provided at the lower surface 34 of the table in a way that it can slide freely. The counter mass 36 is provided with a counter mass platen 40 which is a planar material where protruding magnetic areas 58 and non-magnetic areas 60 are located in a grid. At the lower surface 34 of the table, there are counter mass forcers 42, 44 and 46 each of which faces the counter mass platen 40 and serves as a control electronic device with a pair of pole faces 56 where their phases can be shifted at particular phase angles. Because the counter mass 36 is driven by such a linear pulse motor, a reaction caused by stage driving can be reduced easily and inexpensively. <P>COPYRIGHT: (C)2007,JPO&INPIT |
