| 摘要 |
PROBLEM TO BE SOLVED: To provide a high sensitivity capacitor microphone, and to provide its manufacturing process. SOLUTION: The capacitor microphone comprises a plate having a fixed electrode, a diaphragm having a central portion located closer to the plate side than the near end portion and provided with a movable electrode in the central portion to vibrate by an acoustic wave, and a spacer holding the near end portion of the plate and the near end portion of the diaphragm while insulating the plate from the diaphragm. COPYRIGHT: (C)2007,JPO&INPIT
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