| 摘要 |
In a method of manufacturing a semiconductor device, a recess is formed in a semiconductor substrate. A gate insulating film is formed on a surface of the semiconductor substrate and a surface of the recess; and a gate electrode film is deposited on the gate insulating film to fill the recess. Then, a gate electrode is formed by etching the gate electrode film by using a predetermined mask, and ion implantation into the semiconductor substrate is carried out to form diffusion layers extending from the recess, before the forming a gate electrode at least.
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