| 摘要 |
PROBLEM TO BE SOLVED: To uniformize the atmosphere in a reaction vessel by reducing an influence of a through hole provided in an aperture for introducing and discharging reaction gas into and from the reaction vessel to the outside of the reaction vessel. SOLUTION: The through-holes 21 of the aperture 2 provided at a port for reaction gas in the closed reaction vessel are arranged in a circle and are inclined with respect to a central axis, so that an influence of reaction produced in the reaction vessel is prevented from being transmitted to the outside through the aperture 2. Since the plurality of through-holes 21 are formed symmetrically on concentric circles and inclined with respect to a vertical axis, the gas passing through the aperture forms a spiral flow and uniformizes the atmosphere in the reaction vessel. COPYRIGHT: (C)2007,JPO&INPIT
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