| 摘要 |
PROBLEM TO BE SOLVED: To realize a sample moving system of electron microscope hardly affected by acoustic vibration and vibration of floor. SOLUTION: The sample moving system of electron microscope is composed of a goniometer (100) airtightly arranged through a wall (300) of a sample chamber in a manner of making one end side of rod-shaped sample holder (200) supporting the sample in free movement in longitudinal direction, locate in the sample chamber, a cover (500) covering a part serving as an outside of the wall of the sample chamber of the sample holder and the goniometer in pressure resistant manner, and a pressurizing means (600, 601) for keeping the pressure inside the cover higher than atmospheric pressure. COPYRIGHT: (C)2007,JPO&INPIT
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