| 摘要 |
PROBLEM TO BE SOLVED: To provide an electric contact switching device which does not require strict control of the injection amount of a conductive fluid, and to provide a method for manufacturing the electric contact switching device. SOLUTION: The electric contact switching device is provided with a silicon substrate 1 where a groove 2 and a fluid reservoir 3 are formed on one side, a non-conductive fluid 5 present at one end of the groove 2, a conductive fluid 6 present in the remaining part of the groove 2 and the fluid reservoir 3, a glass substrate 7 mounted on one side of the silicon substrate 1, and a piezoelectric actuator 8 which moves the conductive fluid 6 inside the fluid reservoir 3 towards the groove 2 side by depressing a diaphragm 4 upon energization. On the glass substrate 7, four contacts 10a to 10d are formed with a part of them facing on the inside of the groove 2. Branched patterns 16a and 17a are cut for making electrical connections between contacts 10a and 10b and electrode pad 14 or 15 in touch with the conductive fluid 6, in a state where the conductive fluid 6 is injected and the piezoelectric actuator 8 is not energized. COPYRIGHT: (C)2007,JPO&INPIT
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