| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflector which has a high reflectance on a visible light region and is excellent in moisture resistance and sulfur resistance. SOLUTION: The reflector 10 comprises: a base material 11; a silicon compound film 14 which comprises one kind selected from a group consisting of silicon nitride, silicon oxide and silicon oxide nitride; a silver film 13 made of silver or silver alloy which is disposed between the base material 11 and the silicon compound film 14; a hydrocarbon film 15 formed by applying the silicon compound film 14 to plasma treatment; and a substrate film 12 made of oxide which is disposed between the base material 11 and the silver film 13 as necessary. COPYRIGHT: (C)2007,JPO&INPIT
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