发明名称 SEMICONDUCTOR INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To solve the problem that a mechanical relay contact must be used for the switch for bypassing an amplifier for generating a high level signal to make the constitution complicated because interchangeable performance is necessary, and that the mechanical relay is more expensive than an optical MOSFET to generate factors for cost increase. SOLUTION: A band width restriction part for eliminating the high frequency component of signal is provided on the input side of the amplifier for generating high level signal. The semiconductor contacts such as optical MOSFETs are capable of using as contacts for bypassing the amplifier 6 because capable of eliminating the differential wave form generating by the capacitance between the input/output parts of the optical MOSFETs 5, 7 and 11. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007064629(A) 申请公布日期 2007.03.15
申请号 JP20050246907 申请日期 2005.08.29
申请人 YOKOGAWA ELECTRIC CORP 发明人 KUMAKI TAMOTSU;SATO MITSUHISA
分类号 G01R31/28 主分类号 G01R31/28
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