发明名称 Method of fabricating wafer chips
摘要 Example embodiments of the present invention relate to a method of packaging a semiconductor device. Other example embodiments of the present invention relate to a method of fabricating wafer chips for packaging a semiconductor device. Provided is a method of fabricating a wafer chips, which can perform a reliable pick-up process by removing the adhesive component adhering onto the cutting surfaces of the wafer chips, the diced DAF and the first base film. The method includes preparing at least one wafer, attaching at least one film onto a back surface of the wafer to support the wafer, forming wafer chips by dicing the wafer, detaching the at least one film from the wafer chips and attaching at least one base film onto the wafer chips to support the wafer chips.
申请公布号 US2007057410(A1) 申请公布日期 2007.03.15
申请号 US20060500345 申请日期 2006.08.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHAN DAE-SANG;KO JUN-YOUNG;KIM SANG-JUN;SIN WHA-SU
分类号 H05B6/00 主分类号 H05B6/00
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